US Patent Issued to ASML NETHERLANDS on Jan. 28 for "Method for determining a measurement recipe and associated apparatuses" (Dutch Inventors)

ALEXANDRIA, Va., Jan. 29 -- United States Patent no. 12,210,293, issued on Jan. 28, was assigned to ASML NETHERLANDS B.V. (Veldhoven, Netherlands).

"Method for determining a measurement recipe and associated apparatuses" was invented by Wim Tjibbo Tel (Helmond, Netherlands) and Adriaan Johan Van Leest (Eindhoven, Netherlands).

According to the abstract* released by the U.S. Patent & Trademark Office: "A method for determining a measurement recipe describing one or more measurement settings for measuring a parameter of interest from a substrate subject to an etch induced parameter error, the etch induced parameter error affecting measurement of the parameter of interest in a recipe dependent manner. The method include obtaining parameter o...