US Patent Issued to ASML NETHERLANDS on Jan. 28 for "Method and metrology tool for determining information about a target structure, and cantilever probe" (Dutch Inventors)

ALEXANDRIA, Va., Jan. 29 -- United States Patent no. 12,209,994, issued on Jan. 28, was assigned to ASML NETHERLANDS B.V. (Veldhoven, Netherlands).

"Method and metrology tool for determining information about a target structure, and cantilever probe" was invented by Zili Zhou (Veldhoven, Netherlands), Mustafa Umit Arabul (Eindhoven, Netherlands) and Coen Adrianus Verschuren (Eindhoven, Netherlands).

According to the abstract* released by the U.S. Patent & Trademark Office: "The disclosure relates to determining information about a target structure formed on a substrate using a lithographic process. In one arrangement, a cantilever probe is provided having a cantilever arm and a probe element. The probe element extends from the cantilever ...