US Patent Issued to ASML Netherlands on Jan. 27 for "System and method for generating level data for a surface of a substrate" (Dutch, Belgian Inventors)

ALEXANDRIA, Va., Jan. 28 -- United States Patent no. 12,535,314, issued on Jan. 27, was assigned to ASML Netherlands B.V. (Veldhoven, Netherlands).

"System and method for generating level data for a surface of a substrate" was invented by Arjan Gijsbertsen (Vught, Netherlands), Viktor Trogrlic (Eindhoven, Netherlands), Peter Fernand William Jozef Dendas (Koersel, Belgium), Mihaita Popinciuc (Eindhoven, Netherlands) and Andrey Valerievich Rogachevskiy (Den Bosch, Netherlands).

According to the abstract* released by the U.S. Patent & Trademark Office: "Systems, apparatuses, and methods are provided for generating level data. An example method can include receiving first level data for a first region of a substrate. The first region can incl...