ALEXANDRIA, Va., Jan. 13 -- United States Patent no. 12,525,900, issued on Jan. 13, was assigned to ASML Netherlands B.V. (Veldhoven, Netherlands).
"Object table comprising an electrostatic clamp" was invented by Jan-Gerard Cornelis Van Der Toorn (Eindhoven, Netherlands), Jeroen Gertruda Antonius Huinck (Eindhoven, Netherlands), Han Willem Hendrik Severt (Beek en Donk, Netherlands), Allard Eelco Kooiker (Waalre, Netherlands), Michael Johannes Christiaan Ronde (Berghem, Netherlands), Arno Maria Wellink (Veldhoven, Netherlands), Shibing Liu (San Jose, Calif.), Ying Luo (San Jose, Calif.), Yixiang Wang (Fremont, Calif.), Chia-Yao Chen (San Jose, Calif.), Bohang Zhu (San Jose, Calif.) and Jurgen Van Soest (Amersfoort, Netherlands).
According ...