ALEXANDRIA, Va., Feb. 19 -- United States Patent no. 12,230,470, issued on Feb. 18, was assigned to ASML Netherlands B.V. (Veldhoven, Netherlands).
"Charged particle detector with gain element" was invented by Yongxin Wang (San Ramon, Calif.) and Rui-Ling Lai (San Jose, Calif.).
According to the abstract* released by the U.S. Patent & Trademark Office: "A detector may be provided with a sensing element or an array of sensing elements, each of the sensing elements may have a corresponding gain element. A substrate may be provided having a sensing element and a gain element integrated together. The gain element may include a section in which, along a direction perpendicular to an incidence direction of an electron beam, a region of first co...