ALEXANDRIA, Va., Feb. 12 -- United States Patent no. 12,222,050, issued on Feb. 11, was assigned to ASML Netherlands B.V. (Veldhoven, Netherlands).
"Robust fluid coupling apparatus" was invented by Benjamin Andrew Sams (San Diego), Dietmar Uwe Herbert Trees (San Diego), Vikas Giridhar Telkar (Escondido, Calif.), Alexander Igorevich Ershov (Escondido, Calif.), Theodorus Wilhelmus Driessen (San Diego) and Serkan Kincal (San Diego).
According to the abstract* released by the U.S. Patent & Trademark Office: "A target material supply apparatus includes: first and second fluid flow components (1122, 1126) that define an axial flow path when joined together, in which the axial flow path is between a source of target material fluid and a nozzle s...