US Patent Issued to ASML Netherlands on Feb. 10 for "Inspection tool, inspection tool operating method, and non-transitory computer readable medium" (Dutch Inventors)

ALEXANDRIA, Va., Feb. 11 -- United States Patent no. 12,546,731, issued on Feb. 10, was assigned to ASML Netherlands B.V. (Veldhoven, Netherlands).

"Inspection tool, inspection tool operating method, and non-transitory computer readable medium" was invented by Jasper Frans Mathijs Van Rens (Hegelsom, Netherlands) and Albertus Victor Gerardus Mangnus (Eindhoven, Netherlands).

According to the abstract* released by the U.S. Patent & Trademark Office: "The present disclosure relates to an inspection tool having a charged particle source to provide a charged particle beam, a sample holder to hold a sample, and a scanning system configured to scan the charged particle beam over an area of the sample in a scanning pattern. The scanning system m...