ALEXANDRIA, Va., Dec. 9 -- United States Patent no. 12,493,006, issued on Dec. 9, was assigned to ASML Netherlands B.V. (Veldhoven, Netherlands).
"Systems and methods for signal electron detection" was invented by Weiming Ren (San Jose, Calif.), Zhong-wei Chen (Los Altos, Calif.) and Yongxin Wang (San Ramon, Calif.).
According to the abstract* released by the U.S. Patent & Trademark Office: "Some disclosed embodiments include an electron detector comprising: a first semiconductor layer having a first portion and a second portion; a second semiconductor layer; a third semiconductor layer; a PIN region formed by the first, second, and third semiconductor layers; a power supply configured to apply a reverse bias between the first and the thi...