US Patent Issued to ASML Netherlands on Dec. 9 for "Systems and methods for charged particle flooding to enhance voltage contrast defect signal" (California Inventors)

ALEXANDRIA, Va., Dec. 9 -- United States Patent no. 12,494,342, issued on Dec. 9, was assigned to ASML Netherlands B.V. (Veldhoven, Netherlands).

"Systems and methods for charged particle flooding to enhance voltage contrast defect signal" was invented by Frank Nan Zhang (San Jose, Calif.), Zhongwei Chen (San Jose, Calif.), Yixiang Wang (Fremont, Calif.) and Ying Crystal Shen (Fremont, Calif.).

According to the abstract* released by the U.S. Patent & Trademark Office: "Systems and methods for implementing charged particle flooding in a charged particle beam apparatus are disclosed. According to certain embodiments, a charged particle beam system includes a charged particle source and a controller which controls the charged particle beam s...