US Patent Issued to ASML Netherlands on Dec. 30 for "Method for controlling a manufacturing process and associated apparatuses" (Dutch, American Inventors)

ALEXANDRIA, Va., Dec. 31 -- United States Patent no. 12,510,828, issued on Dec. 30, was assigned to ASML Netherlands B.V. (Veldhoven, Netherlands).

"Method for controlling a manufacturing process and associated apparatuses" was invented by Pioter Nikolski (Veldhoven, Netherlands), Thomas Theeuwes (Veldhoven, Netherlands), Antonio Corradi (Veldhoven, Netherlands), Duan-Fu Stephen Hsu (Fremont, Calif.) and Sun Wook Jung (Eindhoven, Netherlands).

According to the abstract* released by the U.S. Patent & Trademark Office: "Disclosed is a method of determining a process window within a process space comprising obtaining contour data relating to features to be provided to a substrate across a plurality of layers, for each of a plurality of proce...