US Patent Issued to ASML NETHERLANDS on Dec. 30 for "Fabrication process deviation determination method, calibration method, inspection tool, fabrication system and a sample" (Canadian, Dutch Inventors)

ALEXANDRIA, Va., Dec. 31 -- United States Patent no. 12,510,832, issued on Dec. 30, was assigned to ASML NETHERLANDS B.V. (Veldhoven, Netherlands).

"Fabrication process deviation determination method, calibration method, inspection tool, fabrication system and a sample" was invented by Shakeeb Bin Hasan (Montreal) and Nitish Kumar (Eindhoven, Netherlands).

According to the abstract* released by the U.S. Patent & Trademark Office: "A method for determining deviations in a fabrication process, the method including: providing a sample with a layer having a periodic structure fabricated using the fabrication process and intended to cause a corresponding part of the layer to be fully reflective for light having a wavelength in a wavelength ran...