ALEXANDRIA, Va., Dec. 16 -- United States Patent no. 12,500,063, issued on Dec. 16, was assigned to ASML NETHERLANDS B.V. (Veldhoven, Netherlands).
"Method and apparatus for inspection" was invented by Bernardo Kastrup (Veldhoven, Netherlands), Johannes Catharinus Hubertus Mulkens (Valkenswaard, Netherlands), Marinus Aart Van Den Brink (Moergestel, Netherlands), Jozef Petrus Henricus Benschop (Veldhoven, Netherlands), Erwin Paul Smakman (Eindhoven, Netherlands), Tamara Druzhinina (Eindhoven, Netherlands) and Coen Adrianus Verschuren (Eindhoven, Netherlands).
According to the abstract* released by the U.S. Patent & Trademark Office: "An electron beam inspection apparatus, the apparatus including a plurality of electron beam columns, each e...