ALEXANDRIA, Va., Aug. 20 -- United States Patent no. 12,394,589, issued on Aug. 19, was assigned to ASML NETHERLANDS B.V. (Veldhoven, Netherlands).
"Charged particle device, detector, and methods" was invented by Albertus Victor Gerardus Mangnus (Eindhoven, Netherlands) and Erwin Slot (Zoetermeer, Netherlands).
According to the abstract* released by the U.S. Patent & Trademark Office: "A detector for use in a charged particle device for an assessment tool to detect signal particles from a sample, the detector including a substrate, the substrate including: a semiconductor element configured to detect signal particles above a first energy threshold; and a charge-based element configured to detect signal particles below a second energy thre...