ALEXANDRIA, Va., April 9 -- United States Patent no. 12,271,008, issued on April 8, was assigned to ASML NETHERLANDS B.V. (Veldhoven, Netherlands).
"Transmissive diffusor" was invented by Andrey Nikipelov (Eindhoven, Netherlands), Marcus Adrianus Van De Kerkhof (Helmond, Netherlands), Pieter-Jan Van Zwol (Eindhoven, Netherlands), Laurentius Cornelius De Winter (Vessem, Netherlands), Wouter Joep Engelen (Eindhoven, Netherlands) and Alexey Olegovich Polyakov (Veldhoven, Netherlands).
According to the abstract* released by the U.S. Patent & Trademark Office: "A first diffusor configured to receive and transmit radiation has a plurality of layers, each layer arranged to change an angular distribution of EUV radiation passing through it differ...