US Patent Issued to ASML Netherlands on April 8 for "Target delivery system" (California Inventors)

ALEXANDRIA, Va., April 9 -- United States Patent no. 12,273,986, issued on April 8, was assigned to ASML Netherlands B.V. (Veldhoven, Netherlands).

"Target delivery system" was invented by Georgiy Olegovich Vaschenko (San Diego) and Bob Rollinger (San Diego).

According to the abstract* released by the U.S. Patent & Trademark Office: "A target delivery system for an extreme ultraviolet (EUV) light source is disclosed. The system includes: a conduit including an orifice configured to fluidly couple to a reservoir; an actuator configured to mechanically couple to the conduit such that motion of the actuator is transferred to the conduit; and a control system coupled to the actuator, the control system being configured to: determine an indica...