ALEXANDRIA, Va., June 9 -- United States Patent no. 12,288,663, issued on April 29, was assigned to ASML Netherlands B.V. (Veldhoven, Netherlands).
"Charged particle source module" was invented by Laura Dinu-Gurtler (Delft, Netherlands), Eric Petrus Hogervorst (Delft, Netherlands) and Jurgen Van Soest (Delft, Netherlands).
According to the abstract* released by the U.S. Patent & Trademark Office: "The disclosed embodiments relate to a charged particle source module for generating and emitting a charged particle beam, such as an electron beam, comprising: a frame including a first frame part, a second frame part, and one or more rigid support members which are arranged between said first frame part and said second frame part; a charged par...