ALEXANDRIA, Va., June 5 -- United States Patent no. 12,276,919, issued on April 15, was assigned to ASML NETHERLANDS B.V. (Veldhoven, Netherlands).
"Method for controlling a semiconductor manufacturing process" was invented by Marc Hauptmann (Turnhout, Belgium), Cornelis Johannes Henricus Lambregts (Geldrop, Netherlands), Amir Bin Ismail (Eindhoven, Netherlands), Rizvi Rahman (Eindhoven, Netherlands), Allwyn Boustheen (Eindhoven, Netherlands), Raheleh Pishkari (Eindhoven, Netherlands), Everhardus Cornelis Mos (Best, Netherlands), Ekaterina Mikhailovna Viatkina (Eindhoven, Netherlands), Roy Werkman (Eindhoven, Netherlands) and Ralph Brinkhof (Vught, Netherlands).
According to the abstract* released by the U.S. Patent & Trademark Office: "A...