US Patent Issued to ASML NETHERLANDS B.V. & ASML HOLDING on Sept. 23 for "Lithographic apparatus, temperature sensor, and fiber Bragg grating sensor" (Dutch, American Inventors)

ALEXANDRIA, Va., Sept. 23 -- United States Patent no. 12,422,758, issued on Sept. 23, was assigned to ASML NETHERLANDS B.V. & ASML HOLDING N.V. (Veldhoven, Netherlands).

"Lithographic apparatus, temperature sensor, and fiber Bragg grating sensor" was invented by Mahesh Upendra Ajgaonkar (Guilford, Conn.), Gerardus Hubertus Petrus Maria Swinkels (Eindhoven, Netherlands), Laurentius Johannes Adrianus Van Bokhoven (Bergeijk, Netherlands), Joost Andre Klugkist (Waalre, Netherlands) and Koen Martin Willem Jan Bos (Eindhoven, Netherlands).

According to the abstract* released by the U.S. Patent & Trademark Office: "A lithographic apparatus includes an illumination system, a projection system, a temperature-sensitive object, and a temperature sen...