US Patent Issued to ASML NETHERLANDS B.V. & ASML HOLDING on Nov. 4 for "Multi-channel light source for projection optics heating" (Dutch, American Inventors)

ALEXANDRIA, Va., Nov. 6 -- United States Patent no. 12,461,448, issued on Nov. 4, was assigned to ASML NETHERLANDS B.V. & ASML HOLDING N.V. (Veldhoven, Netherlands).

"Multi-channel light source for projection optics heating" was invented by Laurentius Johannes Adrianus Van Bokhoven (Bergeijk, Netherlands) and Mahesh Upendra Ajgaonkar (Guilford, Conn.).

According to the abstract* released by the U.S. Patent & Trademark Office: "Systems, apparatuses, and methods are provided for heating a plurality of optical components. An example method can include receiving an input radiation beam from a radiation source. The example method can further include generating a plurality of output radiation beams based on the input radiation beam. The example...