ALEXANDRIA, Va., June 5 -- United States Patent no. 12,276,784, issued on April 15, was assigned to ASML Netherlands B.V. (Veldhoven, Netherlands) and IMEC v.Z.W. (Leuven, Belgium).
"Micromirror arrays" was invented by Luc Roger Simonne Haspeslagh (Linden, Belgium), Veronique Rochus (Leuven, Belgium), Guilherme Brondani Torri (Leuven, Belgium), Nitesh Pandey (Eindhoven, Netherlands) and Sebastianus Adrianus Goorden (Eindhoven, Netherlands).
According to the abstract* released by the U.S. Patent & Trademark Office: "A micromirror array comprises a substrate, a plurality of minors for reflecting incident light and, for each mirror (20) of the plurality of minors, at least one piezoelectric actuator (21) for displacing the minor, wherein the...