US Patent Issued to ASML NETHERLANDS, ASML HOLDING on Nov. 18 for "Generating an alignment signal based on local alignment mark distortions" (American, Dutch Inventors)

ALEXANDRIA, Va., Nov. 18 -- United States Patent no. 12,474,647, issued on Nov. 18, was assigned to ASML NETHERLANDS B.V. (Veldhoven, Netherlands) and ASML HOLDING N.V. (Veldhoven, Netherlands).

"Generating an alignment signal based on local alignment mark distortions" was invented by Zahrasadat Dastouri (Norwalk, Conn.), Igor Matheus Petronella Aarts (Port Chester, N.Y.), Simon Gijsbert Josephus Mathijssen (Rosmalen, Netherlands) and Peter David Engblom (Hillsboro, Ore.).

According to the abstract* released by the U.S. Patent & Trademark Office: "A method for generating an alignment signal that includes detecting local dimensional distortions of an alignment mark and generating the alignment signal based on the alignment mark. The alignm...