US Patent Issued to ASML Holding on Jan. 20 for "Method to manufacture nano ridges in hard ceramic coatings" (Connecticut Inventors)

ALEXANDRIA, Va., Jan. 20 -- United States Patent no. 12,529,967, issued on Jan. 20, was assigned to ASML Holding N.V. (Veldhoven, Netherlands).

"Method to manufacture nano ridges in hard ceramic coatings" was invented by Mehmet Ali Akbas (Cheshire, Conn.), Tammo Uitterdijk (Wilton, Conn.), Christopher John Mason (Newtown, Conn.), Matthew Lipson (Stamford, Conn.), David Hart Peterson (Milford, Conn.), Michael Perry (Thomaston, Conn.), Peter Helmus (New Milford, Conn.), Jerry Jianguo Deng (Ridgefield, Conn.) and Damoon Sohrabibabaheidary (Norwalk, Conn.).

According to the abstract* released by the U.S. Patent & Trademark Office: "A method for reducing sticking of an object to a surface used in a lithography process includes receiving, at a ...