ALEXANDRIA, Va., Dec. 2 -- United States Patent no. 12,487,081, issued on Dec. 2, was assigned to ASML Holding N.V. (Veldhoven, Netherlands).
"On chip wafer alignment sensor" was invented by Tamer Mohamed Tawfik Ahmed Mohamed Elazhary (New Canaan, Conn.) and Mohamed Swillam (Wilton, Conn.).
According to the abstract* released by the U.S. Patent & Trademark Office: "A sensor apparatus includes an illumination system, a detector system, and a processor. The illumination system is configured to transmit an illumination beam along an illumination path and includes an adjustable optic. The adjustable optic is configured to transmit the illumination beam toward a diffraction target on a substrate that is disposed adjacent to the illumination sy...