US Patent Issued to ASM IP Holding on Sept. 9 for "Semiconductor substrate processing apparatus with a temperature sensor to measure the temperature of a bearing" (Dutch Inventors)

ALEXANDRIA, Va., Sept. 10 -- United States Patent no. 12,412,762, issued on Sept. 9, was assigned to ASM IP Holding B.V. (Almere, Netherlands).

"Semiconductor substrate processing apparatus with a temperature sensor to measure the temperature of a bearing" was invented by Wiebren Harm Damsma (Hilversum, Netherlands), Edwin den Hartog-Besselink (Amsterdam) and Erik ter Vrugt (Rheden, Netherlands).

According to the abstract* released by the U.S. Patent & Trademark Office: "A semiconductor substrate processing apparatus is provided with a reaction chamber; a heater to heat the reaction chamber; and a substrate support assembly. The substrate support assembly comprising: a substrate support defining an outer support surface for supporting a s...