US Patent Issued to ASM IP Holding on Sept. 9 for "Container for efficient vaporization of precursor materials and method of using the same" (Finnish Inventor)

ALEXANDRIA, Va., Sept. 10 -- United States Patent no. 12,410,516, issued on Sept. 9, was assigned to ASM IP Holding B.V. (Almere, Netherlands).

"Container for efficient vaporization of precursor materials and method of using the same" was invented by Antti Niskanen (Helsinki).

According to the abstract* released by the U.S. Patent & Trademark Office: "A precursor vessel for a vapor deposition process is disclosed. The vessel includes a housing having an inlet, an outlet, and defining an interior volume. A tube is disposed within the interior volume and extends from the inlet to the outlet. The tube has sidewalls defining a flowpath there through. The sidewalls have an internal surface facing the flowpath having a plurality of depressions ...