ALEXANDRIA, Va., Sept. 30 -- United States Patent no. 12,431,334, issued on Sept. 30, was assigned to ASM IP Holding B.V. (Almere, Netherlands).
"Gas distribution assembly" was invented by Yukihiro Mori (Machida, Japan), Vincent Hubert Bernard Gilles Babin (Tama, Japan) and Naoto Tsuji (Tokyo).
According to the abstract* released by the U.S. Patent & Trademark Office: "A gas distribution assembly and methods for adjusting the gas flow through a gas supply unit into a reaction chamber are disclosed. The gas distribution assembly and methods can be used to increase or decrease gas flow uniformly through the gas supply unit. The gas distribution assembly and methods can also be used to increase gas flow into one area of the reaction chamber,...