US Patent Issued to ASM IP Holding on Sept. 23 for "Gas distribution assembly including positioning device" (Japanese Inventors)

ALEXANDRIA, Va., Sept. 23 -- United States Patent no. 12,421,606, issued on Sept. 23, was assigned to ASM IP Holding B.V. (Almere, Netherlands).

"Gas distribution assembly including positioning device" was invented by Wei Chen Liao (Hachioji, Japan) and Vincent Hubert Bernard Gilles Babin (Tama, Japan).

According to the abstract* released by the U.S. Patent & Trademark Office: "A gas distribution assembly and method for reducing the eccentricity between a shower plate and an exhaust duct are disclosed. The gas distribution assembly includes positioning devices configured to reduce misalignment between the shower plate and the exhaust duct. The gas distribution assembly and method can be used to improve uniformity of film deposition thickn...