ALEXANDRIA, Va., Sept. 3 -- United States Patent no. 12,406,871, issued on Sept. 2, was assigned to ASM IP Holding B.V. (Almere, Netherlands).
"Substrate susceptor using edge purging" was invented by Raj Singu (Phoenix), Todd Robert Dunn (Cave Creek, Ariz.), Carl Louis White (Gilbert, Ariz.), Herbert Terhorst (Amersfoort, Netherlands), Eric James Shero (Phoenix) and Bhushan Zope (Phoenix).
According to the abstract* released by the U.S. Patent & Trademark Office: "A workpiece susceptor body can include a front face configured to support a workpiece, a back face opposite the front face, a workpiece contact zone at least partially forming a support boundary on an inner portion of the front face, and a plurality of axial channels disposed wi...