ALEXANDRIA, Va., Sept. 17 -- United States Patent no. 12,417,940, issued on Sept. 16, was assigned to ASM IP Holding B.V. (Almere, Netherlands).
"Vented susceptor" was invented by Thomas Fitzgerald (Gilbert, Ariz.).
According to the abstract* released by the U.S. Patent & Trademark Office: "A susceptor can include a face that is configured to support a substrate thereon and a plurality of channels extending into the face and radially outwardly relative to a center of the face. One or more of the plurality of channels may include an elongate portion and a flash-out portion. The elongate portion may have a width less than a threshold width along the entirety of the elongate portion. The flash-out portion may be in fluid communication with t...