ALEXANDRIA, Va., Oct. 28 -- United States Patent no. 12,454,755, issued on Oct. 28, was assigned to ASM IP Holding B.V. (Almere, Netherlands).
"Showerhead assembly and components thereof" was invented by Carl White (Gilbert, Ariz.), Eric Shero (Phoenix), Jereld Winkler (Gilbert, Ariz.) and David Marquardt (Scottsdale, Ariz.).
According to the abstract* released by the U.S. Patent & Trademark Office: "Showerhead assemblies, gas distribution plates, and systems including the same are disclosed. Exemplary showerhead assemblies include a gas distribution plate. Exemplary gas distribution plates include apertures designed to direct a flow of gas and to reduce stagnation of gas on surfaces of the plates."
The patent was filed on Oct. 21, 2020,...