ALEXANDRIA, Va., Oct. 28 -- United States Patent no. 12,451,386, issued on Oct. 21, was assigned to ASM IP Holding B.V. (Almere, Netherlands).
"Electrostatic chuck" was invented by Joaquin Aguilar Santillan (Gilbert, Ariz.), Hong Gao (San Jose, Calif.) and Shanker Kuttath (Austin, Texas).
According to the abstract* released by the U.S. Patent & Trademark Office: "Electrostatic chucks and methods of forming electrostatic chucks are disclosed. Exemplary electrostatic chucks include a ceramic body, a device embedded within the ceramic body, and an interface layer formed overlying the device. Exemplary methods include providing ceramic precursor material within a mold, providing a device, coating the device with an interface material to form ...