ALEXANDRIA, Va., Oct. 21 -- United States Patent no. 12,442,082, issued on Oct. 14, was assigned to ASM IP Holding B.V. (Almere, Netherlands).
"Reactor system comprising a tuning circuit" was invented by Ryu Nakano (Sagamihara, Japan) and Fumitaka Shoji (Kawasaki, Japan).
According to the abstract* released by the U.S. Patent & Trademark Office: "A susceptor assembly for a reactor system may comprise a susceptor body defined by a susceptor outer edge, the susceptor body comprising a susceptor outer portion and a susceptor inner portion, wherein the susceptor outer portion is proximate the susceptor outer edge, and the susceptor inner portion is at least partially enclosed within the susceptor outer portion; a first tuning circuit comprisi...