US Patent Issued to ASM IP Holding on Nov. 18 for "Apparatus for providing a gas mixture to a reaction chamber and method of using same" (Arizona Inventors)

ALEXANDRIA, Va., Nov. 18 -- United States Patent no. 12,473,641, issued on Nov. 18, was assigned to ASM IP Holding B.V. (Almere, Netherlands).

"Apparatus for providing a gas mixture to a reaction chamber and method of using same" was invented by Jereld Lee Winkler (Gilbert, Ariz.), Paul Ma (Scottsdale, Ariz.) and Eric James Shero (Phoenix).

According to the abstract* released by the U.S. Patent & Trademark Office: "Apparatus for mixing two or more gases prior to entering a reaction chamber, reactor systems including the apparatus, and methods of using the apparatus and systems are disclosed. The systems and methods as described herein can be used to, for example, pulse a mixture of two or more precursors to a reaction chamber."

The paten...