ALEXANDRIA, Va., Nov. 11 -- United States Patent no. 12,467,137, issued on Nov. 11, was assigned to ASM IP Holding B.V. (Almere, Netherlands).
"Semiconductor processing device" was invented by Jereld Lee Winkler (Gilbert, Ariz.), Eric James Shero (Phoenix), Carl Louis White (Gilbert, Ariz.), Shankar Swaminathan (Phoenix) and Bhushan Zope (Phoenix).
According to the abstract* released by the U.S. Patent & Trademark Office: "A semiconductor processing device is disclosed. The device can include a reactor and a solid source vessel configured to supply a vaporized solid reactant to the reactor. A process control chamber can be disposed between the solid source vessel and the reactor. The device can include a valve upstream of the process cont...