US Patent Issued to ASM IP Holding on Nov. 11 for "Methods for forming spacers and related structures" (Belgian Inventors)

ALEXANDRIA, Va., Nov. 11 -- United States Patent no. 12,469,703, issued on Nov. 11, was assigned to ASM IP Holding B.V. (Almere, Netherlands).

"Methods for forming spacers and related structures" was invented by Yoann Tomczak (Leuven, Belgium) and Kishan Ashokbhai Patel (Leuven, Belgium).

According to the abstract* released by the U.S. Patent & Trademark Office: "Methods for patterning and forming structures, as well as related structures and systems are disclosed. The methods comprise forming a liner on sidewalls of a patterned resist. The patterned resist comprises a first metal, and the liner comprises a second metal."

The patent was filed on Feb. 9, 2023, under Application No. 18/166,879.

*For further information, including images, ...