US Patent Issued to ASM IP Holding on Nov. 11 for "Method of forming a carbon-containing layer and structure including the layer" (Japanese Inventor)

ALEXANDRIA, Va., Nov. 11 -- United States Patent no. 12,469,693, issued on Nov. 11, was assigned to ASM IP Holding B.V. (Almere, Netherlands).

"Method of forming a carbon-containing layer and structure including the layer" was invented by Yoshiyuki Kikuchi (Tokyo).

According to the abstract* released by the U.S. Patent & Trademark Office: "A method of forming a carbon-containing layer on a surface of a substrate is disclosed. The method can include providing a substrate within a reaction chamber of a reactor, heating a carbon precursor to produce a vaporized gas comprising carbon-containing molecules, providing the vaporized gas to the reaction chamber, and polymerizing the carbon-containing molecules to form the carbon-containing layer o...