ALEXANDRIA, Va., March 5 -- United States Patent no. 12,243,757, issued on March 4, was assigned to ASM IP Holding B.V. (Almere, Netherlands).
"Flange and apparatus for processing substrates" was invented by Jeroen de Jonge (Almere, Netherlands), Sumit Sachdeva (Best, Netherlands), Lucian Jdira (Nieuw Vennep, Netherlands), Julien Laurentius Antonius Maria Keijser (Amersfoort, Netherlands) and Theodorus G. M. Oosterlaken (Oudewater, Netherlands).
According to the abstract* released by the U.S. Patent & Trademark Office: "The disclosure relates to a flange for a process tube in an apparatus for processing substrates, e.g., a vertical furnace. The flange may be provided with an opening for in use giving access to the process chamber of the p...