US Patent Issued to ASM IP Holding on March 11 for "Heater assembly including cooling apparatus and method of using same" (Arizona Inventors)

ALEXANDRIA, Va., March 12 -- United States Patent no. 12,247,286, issued on March 11, was assigned to ASM IP Holding B.V. (Almere, Netherlands).

"Heater assembly including cooling apparatus and method of using same" was invented by Carl Louis White (Gilbert, Ariz.), Eric James Shero (Phoenix), Kyle Fondurulia (Phoenix) and Timothy James Sullivan (Gilbert, Ariz.).

According to the abstract* released by the U.S. Patent & Trademark Office: "A cooling apparatus and methods for maintaining a precursor source vessel heater at a desired temperature are disclosed. The apparatus and methods can be used to maintain a desired temperature gradient within the precursor source vessel for improved integrity of the precursor source before delivery of the...