ALEXANDRIA, Va., June 19 -- United States Patent no. 12,334,307, issued on June 17, was assigned to ASM IP Holding B.V. (Almere, Netherlands).
"Power control for rf impedance matching network" was invented by Ronald Anthony Decker (Turnersville, N.J.) and Imran Ahmed Bhutta (Moorestown, N.J.).
According to the abstract* released by the U.S. Patent & Trademark Office: "In one embodiment, a system includes an RF source and an RF impedance matching circuit receiving RF power from the RF source. The matching circuit includes at least one variable reactance element, a sensor operably coupled to a component of the matching circuit, and a control circuit. The control circuit receives a signal from the sensor indicative of a parameter value. Upon...