ALEXANDRIA, Va., July 9 -- United States Patent no. 12,351,903, issued on July 8, was assigned to ASM IP Holding B.V. (Almere, Netherlands).
"Method and system for depositing molybdenum layers" was invented by Paul Ma (Scottsdale, Ariz.), Roghayyeh Lotfi (Scottsdale, Ariz.), Jaebeom Lee (Tempe, Ariz.), Eric Christopher Stevens (Tempe, Ariz.) and Amit Mishra (Tempe, Ariz.).
According to the abstract* released by the U.S. Patent & Trademark Office: "Methods and systems for forming molybdenum layers on a surface of a substrate and structures and devices formed using the methods are disclosed. Exemplary methods include forming an underlayer prior to forming the molybdenum layer. The underlayer can be used to manipulate stress in the molybdenu...