US Patent Issued to ASM IP Holding on July 22 for "Apparatus for processing a plurality of substrates provided with an extractor chamber" (Dutch Inventors)

ALEXANDRIA, Va., July 23 -- United States Patent no. 12,366,410, issued on July 22, was assigned to ASM IP Holding B.V. (Almere, Netherlands).

"Apparatus for processing a plurality of substrates provided with an extractor chamber" was invented by Theodorus G. M. Oosterlaken (Oudewater, Netherlands), Adriaan Garssen (Doom, Netherlands), Herbert Terhorst (Amersfoort, Netherlands) and Lucian Jdira (Nieuw Vennep, Netherlands).

According to the abstract* released by the U.S. Patent & Trademark Office: "An apparatus 1 for processing a plurality of substrates 3 is provided. The apparatus may have a process tube 5 creating a process chamber 7; a heater 9 surrounding the process tube 5; a flange 11 for supporting the process tube; and a door 15 co...