US Patent Issued to ASM IP Holding on July 1 for "Susceptor assembly for plasma apparatus" (American, Japanese Inventors)

ALEXANDRIA, Va., July 3 -- United States Patent no. 12,347,644, issued on July 1, was assigned to ASM IP Holding B.V. (Almere, Netherlands).

"Susceptor assembly for plasma apparatus" was invented by Sam Kim (Chandler, Ariz.) and Koji Tanaka (Hino, Japan).

According to the abstract* released by the U.S. Patent & Trademark Office: "A susceptor assembly for a reactor system may provide various plasma control benefits. The susceptor assembly includes a body, a heater element, a first electrode, and a second electrode, according to various embodiments. The body may have a top surface, a side surface, and a bottom surface, wherein the top surface is a substrate support surface. The heater element may be embedded within the body. The first and s...