ALEXANDRIA, Va., Jan. 29 -- United States Patent no. 12,209,308, issued on Jan. 28, was assigned to ASM IP Holding B.V. (Almere, Netherlands).
"Reactor and related methods" was invented by Antonius Aarnink (Enschede, Netherlands), Alexey Kovalgin (Enschede, Netherlands) and Peter Jan Cornelis Scheeren (Goor, Netherlands).
According to the abstract* released by the U.S. Patent & Trademark Office: "Systems and related methods are described that can be used for etching and/or depositing materials. In some embodiments, the systems comprise an outer chamber and an inner chamber. The inner chamber can comprise a lower chamber part and an upper chamber part which are moveable with respect to each other between a closed position and an open posit...