US Patent Issued to ASM IP Holding on Jan. 13 for "RF impedance matching with continuous wave and pulsing sources" (Arizona, New Jersey Inventors)

ALEXANDRIA, Va., Jan. 13 -- United States Patent no. 12,525,436, issued on Jan. 13, was assigned to ASM IP Holding B.V. (Netherlands).

"RF impedance matching with continuous wave and pulsing sources" was invented by Imran Ahmed Bhutta (Moorestown, N.J.) and Tomislav Lozic (Gilbert, Ariz.).

According to the abstract* released by the U.S. Patent & Trademark Office: "In one embodiment, a system for semiconductor fabrication includes a continuous wave (CW) radio frequency (RF) source and a pulsing RF source. The system further includes a matching network positioned between the CW RF source and the load and a control circuit. The control circuit receives one or more signals indicative of the pulsing RF signal, and selects a portion of the puls...