US Patent Issued to ASM IP Holding on Jan. 13 for "Method and apparatus for filling a gap" (Belgian, Japanese, Finnish Inventors)

ALEXANDRIA, Va., Jan. 13 -- United States Patent no. 12,525,449, issued on Jan. 13, was assigned to ASM IP Holding B.V. (Almere, Netherlands).

"Method and apparatus for filling a gap" was invented by Viljami Pore (Helsinki), Werner Knaepen (Leuven, Belgium), Bert Jongbloed (Oud-Heverlee, Belgium), Dieter Pierreux (Dilbeek, Belgium), Steven R.A. Van Aerde (Tielt-Winge, Belgium), Suvi Haukka (Helsinki), Atsuki Fukazawa (Tama, Japan) and Hideaki Fukuda (Hachioji, Japan).

According to the abstract* released by the U.S. Patent & Trademark Office: "According to the invention there is provided a method of filling one or more gaps created during manufacturing of a feature on a substrate by providing a deposition method comprising; introducing a f...