US Patent Issued to ASM IP Holding on Feb. 4 for "Substrate processing apparatus including light receiving device and calibration method of light receiving device" (Japanese Inventor)

ALEXANDRIA, Va., Feb. 5 -- United States Patent no. 12,218,269, issued on Feb. 4, was assigned to ASM IP Holding B.V. (Almere, Netherlands).

"Substrate processing apparatus including light receiving device and calibration method of light receiving device" was invented by Kazuhiro Nishiwaki (Tama, Japan).

According to the abstract* released by the U.S. Patent & Trademark Office: "Examples of a substrate processing apparatus includes a chamber configured to contain a stage, a light receiving device configured to receive light inside the chamber, and a substrate transfer apparatus that includes a shaft and a rotation arm configured to rotate with rotation of the shaft and is configured to supply a plurality of light beams having different am...