ALEXANDRIA, Va., Feb. 3 -- United States Patent no. 12,540,389, issued on Feb. 3, was assigned to ASM IP Holding B.V. (Almere, Netherlands).
"Temperature control system for liquid sources" was invented by Ankit Kimtee (Phoenix), Pawan Sharma (Tempe, Ariz.) and Sudhanshu Biyani (Tempe, Ariz.).
According to the abstract* released by the U.S. Patent & Trademark Office: "A reactor system for use in semiconductor processing that makes use of a liquid source for deposition that needs to be maintained within a specific temperature control band or range. The reactor system includes a temperature control system that includes a heating and cooling apparatus for providing both heating and cooling of a vessel that stores the liquid source to maintain...