ALEXANDRIA, Va., Feb. 3 -- United States Patent no. 12,540,391, issued on Feb. 3, was assigned to ASM IP Holding B.V. (Almere, Netherlands).
"Solid source sublimator" was invented by Eric James Shero (Phoenix), Carl Louis White (Gilbert, Ariz.), Mohith E. Verghese (Phoenix), Kyle Fondurulia (Phoenix) and Timothy James Sullivan (Gilbert, Ariz.).
According to the abstract* released by the U.S. Patent & Trademark Office: "Herein disclosed are systems and methods related to solid source chemical sublimator vessels and corresponding deposition modules. The solid source chemical sublimator can include a housing configured to hold solid chemical reactant therein. A lid may be disposed on a proximal portion of the housing. The lid can include a f...