US Patent Issued to ASM IP Holding on Feb. 3 for "End effector and substrate processing apparatus including end effector" (Japanese Inventor)

ALEXANDRIA, Va., Feb. 3 -- United States Patent no. 12,540,041, issued on Feb. 3, was assigned to ASM IP Holding B.V. (Almere, Netherlands).

"End effector and substrate processing apparatus including end effector" was invented by Yuki Dammura (Yamato, Japan).

According to the abstract* released by the U.S. Patent & Trademark Office: "An end effector is disclosed. Exemplary end effector includes a paddle, wherein a proximal end of the paddle is provided with a rear protrusion for positioning a substrate; a ring extending from the paddle, wherein the ring is provided with a circular protrusion for supporting the substrate; and a blade extending from the ring, wherein a distal end of the blade is provided with a front protrusion for position...