US Patent Issued to ASM IP Holding on Feb. 10 for "Standard base components for forming inboard and outboard substrate handling chambers and their use in production of substrate processing systems with expanded production capacity" (Arizona Inventor)

ALEXANDRIA, Va., Feb. 11 -- United States Patent no. 12,550,664, issued on Feb. 10, was assigned to ASM IP Holding B.V. (Almere, Netherlands).

"Standard base components for forming inboard and outboard substrate handling chambers and their use in production of substrate processing systems with expanded production capacity" was invented by Senthil Arasu Subas Chandra Bose (Chandler, Ariz.).

According to the abstract* released by the U.S. Patent & Trademark Office: "Substrate processing systems and methods have expanded substrate processing capabilities. For such systems, substrate handling chamber bodies of different styles and for different areas of the substrate processing system may be formed using a standard substrate handling chamber ...